In modern precision manufacturing, semiconductor processing, and healthcare industries, cleanroom consumables play a critical role in cleaning procedures. The ionic cleanliness of these materials directly impacts product quality and safety. Ion Chromatography (IC) and Extractable/Leachable Ions (EI) testing technologies serve as essential tools to characterize ionic contamination in cleanroom consumables and safeguard clean environments. This article provides a systematic overview of IC and EI testing systems based on ion chromatography, explaining their principles, workflows, industry applications, and technological innovations, helping industries enhance quality control.

1. Testing Principles and Technical Framework

The detection system follows a three-step procedure: extraction, separation, and quantification. Samples are immersed in ultrapure water (18.2 MΩ·cm) at 37°C to simulate actual usage conditions, allowing electrolytes in material surfaces and pores to dissolve fully. The ion chromatograph features dual systems: a cation system with carboxylic acid stationary phase and suppressed conductivity detection, and an anion system using a high-capacity hydroxide-selective column to separate 13 target ions precisely. Coupling with mass spectrometry (IC-MS) achieves ppt-level detection limits, significantly enhancing trace contaminant identification.

2. Standardized Testing Procedure

• Sample Preparation:

  • For cleanroom wipes: weigh 60–70 g for cleanroom fabric or 30–35 g for nonwoven fabric to ensure representativeness.

  • For swabs: select 50 intact swabs, using specialized holders to submerge swab tips completely in solvent.

• Extraction Process:

  • In a Class 100 clean bench, samples are placed in PTFE containers with 50 mL ultrapure water, agitated at 37°C for 2 hours.

• Pre-Treatment:

  • Filter through triple 0.22 μm nylon membranes to remove particulates, ensuring purity of the test solution.

• Chromatographic Analysis:

  • Gradient elution is applied with 20 mM methane sulfonic acid as the mobile phase for cations and KOH gradient elution for anions, achieving precise quantification.

3. Multi-Dimensional Quality Evaluation

The system detects six cations (including lithium Li⁺, sodium Na⁺) and seven anions (such as fluoride F⁻, chloride Cl⁻), with three evaluation metrics:

• Residue per unit mass (μg/g): for fabric-based consumables.

• Load per single item (μg/tip): for discrete products like swabs.

• Release per unit area (μg/cm²): to standardize evaluation for materials with special morphologies.

4. Industry Applications

• Semiconductor Manufacturing: Controls sodium ion contamination in photoresist coating steps to prevent wafer defects.

• Biopharmaceuticals: Monitors endotoxin and ionic risks in cleanroom wipes to ensure sterile production environments.

• Display Panel Manufacturing: Mitigates calcium and magnesium ion-induced film crystallization during wiping, improving product quality.

5. Technological Innovations

• Online Dilution Technology: Enables detection across a wide concentration range from 0.1 to 1000 ppm in a single injection, catering to diverse testing needs.

• Cation Compensation Algorithm: Effectively eliminates interference from ammonium ions (NH₄⁺) co-eluting with sodium ions, enhancing analytical accuracy.

• Material-Solution Partition Coefficient Model: Maps laboratory test data to real-world conditions accurately, increasing practical relevance.

6. Quality Control Development Trends

With the implementation of the new ISO 14644-9:2022 cleanroom standards, IC/EI detection technology is evolving towards:

• Intelligent Analysis: AI-assisted chromatogram interpretation systems to automatically identify unknown peaks.

• Micro-scale Extraction: Development of micro-extraction devices reducing sample consumption to one-fifth of current standards.

• Real-Time Monitoring: Portable ion chromatography instruments for rapid on-site screening and quality control.

Conclusion

IC and EI testing technologies for cleanroom consumables act as a “microscope” to detect ionic contamination in materials, forming a critical defense line in manufacturing quality control. As nanotechnology manufacturing and precision medicine advance, these technologies will continuously innovate, driving upgrades in ultra-clean materials and processes, and providing robust technical support to industries.